LAM RESEARCH CORPORATION patent applications published on December 19th, 2024
Patent applications for LAM RESEARCH CORPORATION on December 19th, 2024
MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD (18701429)
Main Inventor
Troy GOMM
CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS (18819298)
Main Inventor
Siyuan TIAN
VALVE FOR SEMICONDUCTOR EQUIPMENT (18701458)
Main Inventor
John Michael WILTSE
PHOTORESIST DEVELOPMENT WITH HALIDE CHEMISTRIES (18769038)
Main Inventor
Samantha SiamHwa TAN
SYSTEM AND METHOD FOR CARBON PLUG FORMATION (18701384)
Main Inventor
Daniela ANJOS RIGSBY
EXTREME EDGE FEATURE PROFILE TILT CONTROL BY ALTERING INPUT VOLTAGE WAVEFORM TO EDGE RING (18702320)
Main Inventor
Rajesh Dorai
MODIFICATION OF METAL-CONTAINING SURFACES IN HIGH ASPECT RATIO PLASMA ETCHING (18705932)
Main Inventor
He Zhang
STRIP WITH BEVEL CLEANING (18701479)
Main Inventor
Leonid BELAU
VALVE MANIFOLD FOR SEMICONDUCTOR PROCESSING (18701439)
Main Inventor
Aaron Blake Miller