WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS: abstract simplified (17894862)

• This abstract for appeared for patent application number 17894862 Titled 'WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS'

Simplified Explanation

The abstract describes a cart designed for transporting wafers. The cart includes a separator between two wafer holders and an airtight lock to seal the cart. There is also a wafer transfer system that consists of the cart, a first workstation for loading and pressurizing the cart, and a second workstation for depressurizing and unloading the cart. The method for transporting wafers involves docking the cart at a workstation, loading a wafer holder into the cart, pressurizing the space inside the cart, maintaining the pressure, and moving the cart away from the workstation.

Original Abstract Submitted

A cart for wafer transportation includes a cart body, a separator disposed between first and second wafer holders, an airtight lock configured to seal the cart body. A wafer transfer system includes a cart including a space for holding a wafer holder, a first workstation configured to load the wafer holder into the space and pressurize the space, and a second workstation configured to depressurize the space and unload the wafer holder from the space, wherein the cart is transportable between the first workstation and the second workstation. A method for transporting wafers includes docking a cart in a workstation; loading a wafer holder into a space of the cart; pressurizing the space to cause a pressure of the space to be greater than an atmospheric pressure; maintaining the pressure of the space at the pressure; and moving the cart carrying the wafer holder away from the workstation.