US Patent Application 18447425. SUB-RESOLUTION ASSIST FEATURES simplified abstract
Contents
SUB-RESOLUTION ASSIST FEATURES
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.
Inventor(s)
Kenji Yamazoe of San Jose CA (US)
Junjiang Lei of Fremont CA (US)
Danping Peng of Fremont CA (US)
SUB-RESOLUTION ASSIST FEATURES - A simplified explanation of the abstract
This abstract first appeared for US patent application 18447425 titled 'SUB-RESOLUTION ASSIST FEATURES
Simplified Explanation
- The patent application describes methods of fabricating semiconductor devices. - The method involves receiving a design for a mask that will be used in the fabrication process. - The transmission cross coefficient (TCC) of an exposure tool is determined, which helps in understanding how the tool will affect the mask design. - The TCC is then broken down into different orders of eigenvalues and eigenfunctions, which are mathematical concepts used in analyzing the behavior of the TCC. - A kernel is calculated based on these eigenvalues and eigenfunctions. - The first sub-resolution assist feature (SRAF) seed map is determined by convoluting the mask design and the kernel. - The SRAF seed map is used to assist in the fabrication of the semiconductor device. - Overall, the patent application presents a method that utilizes mathematical analysis and convolution techniques to improve the fabrication process of semiconductor devices.
Original Abstract Submitted
Methods of semiconductor device fabrication are provided. In an embodiment, a method of semiconductor device fabrication includes receiving a first mask design comprising a first mask function, determining a transmission cross coefficient (TCC) of an exposure tool, decomposing the TCC into a plurality orders of eigenvalues and a plurality orders of eigenfunctions, calculating a kernel based on the plurality orders of eigenvalues and the plurality orders of eigenfunctions; and determining a first sub-resolution assist feature (SRAF) seed map by convoluting the first mask function and the kernel.
