US Patent Application 18447104. APPARATUS, SYSTEM AND METHOD simplified abstract
Contents
APPARATUS, SYSTEM AND METHOD
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.
Inventor(s)
APPARATUS, SYSTEM AND METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18447104 titled 'APPARATUS, SYSTEM AND METHOD
Simplified Explanation
The patent application describes an apparatus and method for effectively removing evaporated material.
- The apparatus includes a hot plate and an exhaust hood assembly suspended over the hot plate.
- The exhaust hood assembly consists of a trench plate, a cover plate, and a single exhaust pipe header.
- The exhaust hood assembly reduces condensation and collects any remaining condensation to prevent it from affecting further manufacturing steps.
Original Abstract Submitted
An apparatus and a method for effectively exhausting evaporated material are provided. In an embodiment the apparatus includes a hot plate and an exhaust hood assembly suspended over the hot plate. The exhaust hood assembly includes a trench plate, a cover plate over the trench plate and a single exhaust pipe header over and attached to a single exhaust opening of the cover plate. During operation, the exhaust hood assembly reduces the amount of condensation and also collects any remaining condensation in order to help prevent condensation from impacting further manufacturing steps.
