US Patent Application 18446741. MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE simplified abstract

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MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE

Organization Name

Taiwan Semiconductor Manufacturing Company, Ltd.


Inventor(s)

Chun-Wen Cheng of Zhubei City (TW)

Chia-Hua Chu of Zhubei City (TW)

Chun Yin Tsai of Hsinchu City (TW)

Wen Cheng Kuo of Changhua County (TW)

MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE - A simplified explanation of the abstract

This abstract first appeared for US patent application 18446741 titled 'MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE

Simplified Explanation

The patent application describes an electronic device with a semiconductor substrate that has a cavity.

  • The device includes two microelectromechanical systems (MEMS) devices.
  • The first MEMS device has a backplate and a diaphragm that are vertically separated.
  • The second MEMS device has spring structures and a moveable element that is suspended in the cavity.
  • A segment of the semiconductor substrate extends laterally under the sidewalls of both MEMS devices.


Original Abstract Submitted

Various embodiments of the present disclosure are directed towards an electronic device that comprises a semiconductor substrate having a first surface opposite a second surface. The semiconductor substrate at least partially defines a cavity. A first microelectromechanical systems (MEMS) device is disposed along the first surface of the semiconductor substrate. The first MEMS device comprises a first backplate and a diaphragm vertically separated from the first backplate. A second MEMS device is disposed along the first surface of the semiconductor substrate. The second MEMS device comprises spring structures and a moveable element. The spring structures are configured to suspend the moveable element in the cavity. A segment of the semiconductor substrate continuously laterally extends from under a sidewall of the first MEMS device to under a sidewall of the second MEMS device.


Category:B81B3/00 Category:B81C1/00

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