US Patent Application 18446597. IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract

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IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

Organization Name

CANON KABUSHIKI KAISHA==Inventor(s)==

[[Category:Kazuhiro Sato of Tochigi (JP)]]

[[Category:Hiroshi Sato of Tochigi (JP)]]

IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract

This abstract first appeared for US patent application 18446597 titled 'IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

Simplified Explanation

The patent application describes a method for performing an imprint process, which involves bringing a mold into contact with an imprint material on a substrate, curing the imprint material, and separating the mold from the cured imprint material.

  • The method involves acquiring global alignment information, which helps in aligning the mold and the imprint material accurately.
  • A pre-alignment measurement is performed by moving a specific region of the substrate to a measurement position, where a measurement device measures the relative positional shift between the region and the mold.
  • This measured positional shift is used along with the global alignment information to move another region of the substrate to the imprint position, where the actual imprint process takes place.
  • The contacting step, where the mold is brought into contact with the imprint material, is then initiated.


Original Abstract Submitted

Provided is an imprint method of performing an imprint process including a contacting step of bringing a mold into contact with an imprint material on a substrate, a curing step of curing the imprint material, and a separating step of separating the mold from the cured imprint material. The method includes acquiring global alignment information, performing a pre-alignment measurement including moving, based on the acquired global alignment information, a second shot region to a measurement position at which a measurement device performs measurement, and measuring a first relative positional shift between the second shot region and the mold using the measurement device, and moving, based on the global alignment information and the measured first relative positional shift, a first shot region to an imprint position at which the imprint process is performed, and starting the contacting step.

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