US Patent Application 18365315. Liner for A Bi-Layer Gate Helmet and the Fabrication Thereof simplified abstract
Contents
Liner for A Bi-Layer Gate Helmet and the Fabrication Thereof
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.
Inventor(s)
Huan-Chieh Su of Tianzhong Township (TW)
Chih-Hao Wang of Baoshan Township (TW)
Kuo-Cheng Chiang of Zhubei City (TW)
Wei-Hao Wu of Hsinchu City (TW)
Zhi-Chang Lin of Zhubei City (TW)
Jia-Ni Yu of New Taipei City (TW)
Yu-Ming Lin of Hsinchu City (TW)
Chung-Wei Hsu of Hsinchu County (TW)
Liner for A Bi-Layer Gate Helmet and the Fabrication Thereof - A simplified explanation of the abstract
This abstract first appeared for US patent application 18365315 titled 'Liner for A Bi-Layer Gate Helmet and the Fabrication Thereof
Simplified Explanation
The patent application describes a semiconductor device with a unique structure and composition. Here are the key points:
- The device includes a semiconductor layer.
- A gate structure is placed on top of the semiconductor layer.
- A spacer is positioned on the side of the gate structure.
- The spacer is taller than the gate structure.
- A liner is applied to both the gate structure and the spacer.
- The spacer and the liner are made of different materials.
Overall, this patent application introduces a novel design for a semiconductor device, utilizing a taller spacer and different material compositions for the spacer and liner.
Original Abstract Submitted
A semiconductor device includes a semiconductor layer. A gate structure is disposed over the semiconductor layer. A spacer is disposed on a sidewall of the gate structure. A height of the spacer is greater than a height of the gate structure. A liner is disposed on the gate structure and on the spacer. The spacer and the liner have different material compositions.
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Huan-Chieh Su of Tianzhong Township (TW)
- Chih-Hao Wang of Baoshan Township (TW)
- Kuo-Cheng Chiang of Zhubei City (TW)
- Wei-Hao Wu of Hsinchu City (TW)
- Zhi-Chang Lin of Zhubei City (TW)
- Jia-Ni Yu of New Taipei City (TW)
- Yu-Ming Lin of Hsinchu City (TW)
- Chung-Wei Hsu of Hsinchu County (TW)
- H01L29/66
- H01L21/768
- H01L21/8238
- H01L29/78
- H01L27/092