US Patent Application 18361777. IN-SITU APPARATUS FOR DETECTING ABNORMALITY IN PROCESS TUBE simplified abstract
Contents
IN-SITU APPARATUS FOR DETECTING ABNORMALITY IN PROCESS TUBE
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.
Inventor(s)
Chung-Pin Chou of Hsinchu (TW)
Yan-Cheng Chen of Hsinchu (TW)
Kai-Lin Chuang of Hsinchu (TW)
Sheng-Ching Kao of Hsinchu (TW)
IN-SITU APPARATUS FOR DETECTING ABNORMALITY IN PROCESS TUBE - A simplified explanation of the abstract
This abstract first appeared for US patent application 18361777 titled 'IN-SITU APPARATUS FOR DETECTING ABNORMALITY IN PROCESS TUBE
Simplified Explanation
The abstract describes a process tube device that can detect the presence of external materials in a fluid flowing through a tube. This device eliminates the need for a separate inspection device to check the surface of a wafer after applying fluid.
- The process tube device uses two methods to detect external materials.
- The first method involves using a light detecting sensor to directly measure the presence of external materials.
- The second method uses a sensor based on the principles of Doppler shift to indirectly measure the presence of external materials.
- Unlike the first method that relies on reflected or refracted light, the second method measures the velocity of the fluid flowing in the tube to detect the presence of external materials.
- This device allows for in-situ detection of external materials, making the inspection process more efficient and eliminating the need for additional equipment.
Original Abstract Submitted
A process tube device can detect the presence of any external materials that may reside within a fluid flowing in the tube. The process tube device detects the external materials in-situ which obviates the need for a separate inspection device to inspect the surface of a wafer after applying fluid on the surface of the wafer. The process tube device utilizes at least two methods of detecting the presence of external materials. The first is the direct measurement method in which a light detecting sensor is used. The second is the indirect measurement method in which a sensor utilizing the principles of Doppler shift is used. Here, contrary to the first method that at least partially used reflected or refracted light, the second method uses a Doppler shift sensor to detect the presence of the external material by measuring the velocity of the fluid flowing in the tube.
