US Patent Application 18338800. CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE simplified abstract
CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE
Organization Name
Inventor(s)
SETH J. Bamesberger of Austin TX (US)
BYUNG-JIN Choi of Austin TX (US)
CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE - A simplified explanation of the abstract
- This abstract for appeared for US patent application number 18338800 Titled 'CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE'
Simplified Explanation
The abstract describes a chuck assembly used for holding a plate. The assembly includes a member that can hold the plate, which has a flexible portion with a central opening. The plate is held in place by reducing pressure in a first cavity formed by the flexible portion. There is also a light-transmitting member that covers the central opening of the member. Additionally, there is a fluid path that connects to a second cavity defined by the member, the plate, and the light-transmitting member. This fluid path is used to pressurize the second cavity.
Original Abstract Submitted
A chuck assembly for holding a plate comprises a member configured to hold the plate, the member including a flexible portion configured to have a central opening, and a first cavity formed by the flexible portion, wherein the plate is held by the flexible portion by reducing pressure in the first cavity, a light-transmitting member covering the central opening of the member, and a fluid path in communication with a second cavity defined by the member, the plate held by the member and the light-transmitting member for pressurizing the second cavity.
