US Patent Application 18336252. PROTECTIVE LINER LAYERS IN 3D MEMORY STRUCTURE simplified abstract

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PROTECTIVE LINER LAYERS IN 3D MEMORY STRUCTURE

Organization Name

Taiwan Semiconductor Manufacturing Company, Ltd.


Inventor(s)

Tsu Ching Yang of Taipei (TW)


Sheng-Chih Lai of Hsinchu County (TW)


Yu-Wei Jiang of Hsinchu (TW)


Kuo-Chang Chiang of Hsinchu City (TW)


Hung-Chang Sun of Kaohsiung City (TW)


Chen-Jun Wu of Hsinchu City (TW)


Feng-Cheng Yang of Zhudong Township (TW)


Chung-Te Lin of Tainan City (TW)


PROTECTIVE LINER LAYERS IN 3D MEMORY STRUCTURE - A simplified explanation of the abstract

  • This abstract for appeared for US patent application number 18336252 Titled 'PROTECTIVE LINER LAYERS IN 3D MEMORY STRUCTURE'

Simplified Explanation

The abstract describes a memory device that consists of multiple layers arranged on a substrate. It includes a first memory cell with conductive lines and a channel layer. There are also barrier structures and protective liner layers to separate and protect different components of the device.


Original Abstract Submitted

A memory device includes a stack of gate electrode layers and interconnect layers arranged over a substrate. A first memory cell that is arranged over the substrate includes a first source/drain conductive lines and a second source/drain conductive line extending vertically through the stack of gate electrode layers. A channel layer and a memory layer are arranged on outer sidewalls of the first and second source/drain conductive lines. A first barrier structure is arranged between the first and second source/drain conductive lines. A first protective liner layer separates the first barrier structure from each of the first and second source/drain conductive lines. A second barrier structure is arranged on an opposite side of the first source/drain conductive line and is spaced apart from the first source/drain conductive line by a second protective liner layer.