US Patent Application 18332261. METHOD OF SUPPLYING CHEMICAL LIQUID simplified abstract
Contents
METHOD OF SUPPLYING CHEMICAL LIQUID
Organization Name
Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor(s)
Yu-Cheng Chang of Miaoli County (TW)
Keng-Hui Pan of Tainan City (TW)
Chieh-Jan Huang of Hsinchu City (TW)
Ming-Lee Lee of Kaohsiung City (TW)
Chiang-Jeh Chen of Hsinchu City (TW)
METHOD OF SUPPLYING CHEMICAL LIQUID - A simplified explanation of the abstract
- This abstract for appeared for US patent application number 18332261 Titled 'METHOD OF SUPPLYING CHEMICAL LIQUID'
Simplified Explanation
This abstract describes a method for supplying a chemical liquid to a processing tool. The method involves placing a drum containing the chemical liquid into a chamber of a chemical liquid supplying system. The drum is connected to a testing pipe, and the chemical liquid is pumped from the drum into the testing pipe. The condition of the chemical liquid flowing through the testing pipe is continuously monitored. Based on this condition, it is determined whether the chemical liquid should be supplied to the processing tool or not.
Original Abstract Submitted
A method includes moving a drum containing a chemical liquid into a chamber of a chemical liquid supplying system. The drum is connected with a testing pipe. The chemical liquid is pumped from the drum to the testing pipe. A condition of the chemical liquid flowing through the testing pipe is monitored. Whether the chemical liquid is supplied to a processing tool is determined based on the condition of the chemical liquid.
