US Patent Application 18322379. LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND PIEZOELECTRIC DEVICE simplified abstract

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LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND PIEZOELECTRIC DEVICE

Organization Name

SEIKO EPSON CORPORATION

Inventor(s)

Harunobu Koike of MATSUMOTO-SHI (JP)

Takashi Aoki of SHIOJIRI-SHI (JP)

LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND PIEZOELECTRIC DEVICE - A simplified explanation of the abstract

This abstract first appeared for US patent application 18322379 titled 'LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND PIEZOELECTRIC DEVICE

Simplified Explanation

The abstract describes a vibration plate that is composed of three layers: a first layer containing silicon, a second layer containing a metal element (excluding zirconium), and a third layer containing zirconium.

  • The vibration plate has an active region that overlaps with the pressure chamber, first electrode, piezoelectric body layer, and second electrode.
  • The active region consists of the first layer, second layer, and third layer.
  • The vibration plate also has an inactive region that overlaps with the pressure chamber but does not overlap with the first electrode, piezoelectric body layer, and second electrode.
  • At least part of the inactive region consists of only the first layer and second layer, without the third layer.


Original Abstract Submitted

A vibration plate includes a first layer containing silicon as a constituent element, a second layer containing a metal element other than zirconium as a constituent element, and a third layer containing zirconium as a constituent element. When a region of the vibration plate that overlaps with the pressure chamber and overlaps with the first electrode, the piezoelectric body layer, and the second electrode is an active region, and a region of the vibration plate that overlaps with the pressure chamber and does not overlap with the first electrode, the piezoelectric body layer, and the second electrode is an inactive region, the vibration plate has the first layer, the second layer, and the third layer in the active region, and has the first layer and the second layer and does not have the third layer in at least part of the inactive region.

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