US Patent Application 18308740. METHOD OF MANUFACTURING DISPLAY APPARATUS simplified abstract

METHOD OF MANUFACTURING DISPLAY APPARATUS

Organization Name

Samsung Display Co., LTD.

Inventor(s)

Gugrae Jo of Yongin-si (KR)

Hyoungsik Kim of Yongin-si (KR)

Woojin Cho of Yongin-si (KR)

Jongsoon Lee of Hwaseong-si (KR)

Hongjae Lee of Yongin-si (KR)

Kyusang Kim of Hwaseong-si (KR)

Seonjeong Kim of Hwaseong-si (KR)

Heejeon Ma of Yongin-si (KR)

Wonil Park of Yongin-si (KR)

Kicheon Byun of Hwaseong-si (KR)

Woojin Lee of Yongin-si (KR)

METHOD OF MANUFACTURING DISPLAY APPARATUS - A simplified explanation of the abstract

This abstract first appeared for US patent application 18308740 titled 'METHOD OF MANUFACTURING DISPLAY APPARATUS

Simplified Explanation

The patent application describes a method of manufacturing a display apparatus.

• The method involves several steps, including forming a semiconductor layer on a substrate.
• An insulating layer is then formed on top of the semiconductor layer.
• A photoresist pattern is created on the insulating layer.
• The insulating layer is etched to create a contact hole, which exposes part of the semiconductor layer.
• A primary cleaning process is performed on the insulating layer using a cleaning gas that contains a fluorine-containing gas and a hydrogen-containing gas.

Original Abstract Submitted

A method of manufacturing a display apparatus includes forming a semiconductor layer on a substrate, forming an insulating layer on the semiconductor layer, forming a photoresist pattern on the insulating layer, forming, by etching the insulating layer, a contact hole exposing at least a portion of the semiconductor layer, and performing a primary cleaning of the insulating layer in which the contact hole is formed using a cleaning gas including a fluorine-containing gas and a hydrogencontaining gas.