US Patent Application 18297850. MANAGEMENT APPARATUS, PROCESSING SYSTEM, MANAGEMENT METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract

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MANAGEMENT APPARATUS, PROCESSING SYSTEM, MANAGEMENT METHOD, AND ARTICLE MANUFACTURING METHOD

Organization Name

CANON KABUSHIKI KAISHA


Inventor(s)

Ryo Nawata of Tochigi (JP)


Yuichiro Miki of Kanagawa (JP)


MANAGEMENT APPARATUS, PROCESSING SYSTEM, MANAGEMENT METHOD, AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract

  • This abstract for appeared for US patent application number 18297850 Titled 'MANAGEMENT APPARATUS, PROCESSING SYSTEM, MANAGEMENT METHOD, AND ARTICLE MANUFACTURING METHOD'

Simplified Explanation

The abstract describes a management apparatus that is used to control a processing apparatus. The processing apparatus includes a driver that controls a target object in multiple directions, and a controller that uses a neural network to control the driver. The neural network's parameters are determined through reinforcement learning, where a reward is evaluated based on the control results of the target object. The management apparatus includes a learning unit that adjusts the rewards for each drive axis based on the required precision for that axis.


Original Abstract Submitted

Provided is a management apparatus for managing a processing apparatus including a driver configured to drive a target object in regard to a plurality of drive axes, and a controller configured to control the driver using a neural network for which a parameter for outputting a manipulated variable to the target object is decided by reinforcement learning. The management apparatus includes a learning unit configured to decide the parameter of the neural network by reinforcement learning. The learning unit performs the reinforcement learning by evaluating a reward obtained from a control result of the target object by the controller, and relatively adjusts rewards regarding the respective drive axes in accordance with required precisions for the respective drive axes.