US Patent Application 18208918. ACOUSTIC WAVE DEVICE simplified abstract
Contents
ACOUSTIC WAVE DEVICE
Organization Name
Murata Manufacturing Co., Ltd.
Inventor(s)
Katsumi Suzuki of Nagaokakyo-shi (JP)
ACOUSTIC WAVE DEVICE - A simplified explanation of the abstract
- This abstract for appeared for US patent application number 18208918 Titled 'ACOUSTIC WAVE DEVICE'
Simplified Explanation
This abstract describes an acoustic wave device that consists of several layers, including a support substrate, an intermediate layer, a piezoelectric layer, and an IDT electrode. The device also includes a cavity portion within the support. The piezoelectric layer has a membrane portion that overlaps with the cavity portion. The IDT electrode is located within the membrane portion. Additionally, there is a spacer layer within the support, made of a different material than the other layers. The spacer layer is located in a portion of the device that is not the cavity portion.
Original Abstract Submitted
An acoustic wave device includes a support including support substrate and an intermediate layer on the support substrate, a piezoelectric layer on the intermediate layer, and an IDT electrode on the piezoelectric layer. A cavity portion is provided in the support. The piezoelectric layer includes a membrane portion overlapping the cavity portion in a plan view. At least a portion of the IDT electrode is in the membrane portion. A spacer layer is in the support and made of a material different from materials of the piezoelectric layer and the intermediate layer. The spacer layer is located in a portion other than the cavity portion.
