US Patent Application 18136798. ON-WAFER TEST MECHANISM FOR WAVEGUIDES simplified abstract
Contents
ON-WAFER TEST MECHANISM FOR WAVEGUIDES
Organization Name
Inventor(s)
Joseph Daniel Lowney of Tucson AZ (US)
ON-WAFER TEST MECHANISM FOR WAVEGUIDES - A simplified explanation of the abstract
- This abstract for appeared for US patent application number 18136798 Titled 'ON-WAFER TEST MECHANISM FOR WAVEGUIDES'
Simplified Explanation
The abstract describes a testing mechanism that is used to test structures on a wafer. The mechanism includes waveguides and test structures on the wafer. Light sources are used to send beams of light through the wafer to the test structures. When the test structures receive the light, they guide it to an exit location. A conoscope is then used to measure the diffraction efficiency of the test structure by analyzing the light that exits it.
Original Abstract Submitted
An on-wafer testing mechanism includes multiple waveguides and test structures disposed on a wafer. Light sources are coupled to the wafer and provide beams of light to the structures disposed on the wafer by propagating the light through the wafer. In response to receiving at least a portion of a beam of light, a test structure is configured to guide the light to an exit location on the test structure. As light exits a test structure, a conoscope determines the diffraction efficiency of the test structure based on a measurement taken of the light exiting the test structure.
