US Patent Application 18133225. EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME simplified abstract
Contents
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME
Inventors
SEUNG-WAN Kim of Seongnam-si (KR)
JAECHEOL Lee of Cheonan-si (KR)
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME - A simplified explanation of the abstract
- This abstract for appeared for US patent application number 18133225 Titled 'EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME'
Simplified Explanation
The abstract describes an exposure apparatus used in manufacturing processes. It consists of a stage where a target substrate is placed, and this stage has multiple holes. The apparatus also includes a light source that emits light onto the stage. To support the target substrate, there are several support pins that go through the holes. These support pins include a fixed support pin that remains in a fixed position and a first variable support pin that can move back and forth in one direction. The holes on the stage consist of a pair of first holes, which are penetrated by the fixed support pin and are arranged side by side with a specific distance between them along the same direction, and a second hole, which is penetrated by the first variable support pin and is located between the pair of first holes.
Original Abstract Submitted
An exposure apparatus includes a stage on which a target substrate is loaded and in which a plurality of holes are defined, a light source part radiating light to the stage, and a plurality of support pins disposed to penetrate the plurality of holes and supporting the target substrate, the plurality of support pins include a fixed support pin whose position is fixed in a plan view and a first variable support pin capable of reciprocating movement in a first direction, and the plurality of holes include a pair of first holes penetrated by the fixed support pin and arranged side by side at a predetermined interval along the first direction and a second hole penetrated by the first variable support pin and disposed between the pair of first holes.
