US Patent Application 18106254. RESIST COMPOUND AND METHOD OF FORMING PATTERN USING THE SAME simplified abstract

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RESIST COMPOUND AND METHOD OF FORMING PATTERN USING THE SAME

Organization Name

Samsung Electronics Co., Ltd.


Inventor(s)

HOYOUNG Kim of Suwon-si (KR)


Youngkwan Lee of Suwon-si (KR)


SOOCHAN Kim of Suwon-si (KR)


Hyungjun Chee of Suwon-si (KR)


HYUNWOO Kim of Suwon-si (KR)


SONGSE Yi of Suwon-si (KR)


RESIST COMPOUND AND METHOD OF FORMING PATTERN USING THE SAME - A simplified explanation of the abstract

  • This abstract for appeared for US patent application number 18106254 Titled 'RESIST COMPOUND AND METHOD OF FORMING PATTERN USING THE SAME'

Simplified Explanation

The abstract states that there is a compound called resist, which is represented by Formula 1. It does not provide any further information about the compound or its properties.


Original Abstract Submitted

A resist compound is represented by Formula 1: