US Patent Application 18050684. SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME simplified abstract

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SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

Inventors

Namkyu Cho of Suwon-si (KR)


Seokhoon Kim of Suwon-si (KR)


Jeongho Yoo of Suwon-si (KR)


Choeun Lee of Suwon-si (KR)


Pankwi Park of Suwon-si (KR)


Dongsuk Shin of Suwon-si (KR)


SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A simplified explanation of the abstract

  • This abstract for appeared for patent application number 18050684 Titled 'SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME'

Simplified Explanation

This abstract describes a semiconductor device that consists of a substrate with a first active pattern. On top of this pattern, there is a first channel pattern, which includes three semiconductor patterns stacked vertically and spaced apart. These patterns are connected to a first source/drain pattern and have a gate electrode on top. The first source/drain pattern has three protrusions, each protruding towards one of the semiconductor patterns. The second protrusion is wider than the first, and the third protrusion is wider than the second.


Original Abstract Submitted

A semiconductor device includes a substrate including a first active pattern, a first channel pattern on the first active pattern, the first channel pattern including first, second, and third semiconductor patterns spaced apart from one another and vertically stacked, a first source/drain pattern connected to the first to third semiconductor patterns, and a gate electrode on the first to third semiconductor patterns. The first source/drain pattern includes a first protrusion protruding toward the first semiconductor pattern, a second protrusion protruding toward the second semiconductor pattern, and a third protrusion protruding toward the third semiconductor pattern. A width of the second protrusion is greater than a width of the first protrusion. A width of the third protrusion is greater than the width of the second protrusion.