US Patent Application 18044538. Contactless Conveyor Device simplified abstract
Contents
Contactless Conveyor Device
Organization Name
Inventor(s)
Stefan Teusch of Reutlingen (DE)
Joachim Frangen of Heilbronn (DE)
Contactless Conveyor Device - A simplified explanation of the abstract
This abstract first appeared for US patent application 18044538 titled 'Contactless Conveyor Device
Simplified Explanation
The patent application describes a conveyor device for transporting multiple wafers simultaneously.
- The device uses a transport body (mover) for each wafer, which can move and position itself over a stator surface.
- The transport body can move in all six degrees of freedom.
- The wafers and their transport bodies are placed in a sealed transport chamber.
- The stator is located below the transport chamber, and the chamber floor is parallel to the stator surface.
- The housing of each transport body is also sealed.
Original Abstract Submitted
The disclosure relates to a conveyor device which is designed to simultaneously convey a plurality of payloads, in particular wafers. Each payload is paired with a transport body (mover) which can be moved and positioned in a floating manner over a surface of a stator, and the transport body is moved and positioned preferably with respect to all six degrees of freedom. The transport body and the paired payloads are received in a sealed transport chamber, the stator is arranged below the sealed transport chamber, the floor of the transport chamber is arranged above the surface of the stator and parallel thereto, and the housing of each transport body is likewise preferably sealed.
