US Patent Application 17968597. CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING simplified abstract
Contents
CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING
Organization Name
Inventor(s)
Steven M. Zuniga of Soquel CA (US)
Jeonghoon Oh of Saratoga CA (US)
Andrew J. Nagengast of Sunnyvale CA (US)
CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING - A simplified explanation of the abstract
This abstract first appeared for US patent application 17968597 titled 'CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING
Simplified Explanation
- The patent application describes a carrier head used in chemical mechanical polishing. - The carrier head includes a housing, a substrate mounting surface, and a retaining ring assembly. - The retaining ring assembly consists of an inner ring, a first actuator, an outer ring, and a second actuator. - The inner ring surrounds the substrate mounting surface and has slots that divide it into arcuate segments. - The first actuator adjusts the vertical load on the inner ring. - The outer ring surrounds the inner ring. - The second actuator applies a radially inward pressure to flex the arcuate segments inwardly. - The purpose of this design is to provide better control and stability during the polishing process.
Original Abstract Submitted
A carrier head for chemical mechanical polishing includes a housing, a substrate mounting surface, and a retaining ring assembly. The retaining ring assembly includes an inner ring surrounding the substrate mounting surface and having an inner surface to retain the substrate below the substrate mounting surface, a first actuator to adjust a vertical load on the inner ring, an outer ring surrounding the inner ring, and a second actuator positioned between the inner ring and the outer ring. The inner ring has a plurality of slots that are formed in a lower surface and that extend from the inner surface to an outer surface of the inner ring to divide the inner ring into a plurality of arcuate segments suspended from an upper portion. The second actuator applies a radially inward pressure such that the plurality of arcuate segments flex inwardly relative to the upper portion.
