US Patent Application 17894862. WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS simplified abstract
Contents
WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.
Inventor(s)
Ren-Hau Wu of New Taipei City (TW)
Cheng-Kang Hu of Kaohsiung (TW)
Chieh-Chun Lin of Hsinchu (TW)
WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS - A simplified explanation of the abstract
- This abstract for appeared for US patent application number 17894862 Titled 'WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS'
Simplified Explanation
The abstract describes a cart designed for transporting wafers, which includes a separator and an airtight lock to ensure the wafer's safety. It also introduces a wafer transfer system that consists of a cart, a first workstation for loading and pressurizing the cart, and a second workstation for depressurizing and unloading the cart. The method for transporting wafers involves docking the cart, loading the wafer holder, pressurizing the space, maintaining the pressure, and moving the cart away from the workstation.
Original Abstract Submitted
A cart for wafer transportation includes a cart body, a separator disposed between first and second wafer holders, an airtight lock configured to seal the cart body. A wafer transfer system includes a cart including a space for holding a wafer holder, a first workstation configured to load the wafer holder into the space and pressurize the space, and a second workstation configured to depressurize the space and unload the wafer holder from the space, wherein the cart is transportable between the first workstation and the second workstation. A method for transporting wafers includes docking a cart in a workstation; loading a wafer holder into a space of the cart; pressurizing the space to cause a pressure of the space to be greater than an atmospheric pressure; maintaining the pressure of the space at the pressure; and moving the cart carrying the wafer holder away from the workstation.
