US Patent Application 17827204. SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DISTANCE simplified abstract

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SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DISTANCE

Organization Name

Applied Materials, Inc.

Inventor(s)

Tyler Wills of Marblehead MA (US)

George M. Gammel of Marblehead MA (US)

Eric Donald Wilson of Rockport MA (US)

Jay T. Scheuer of Rowley MA (US)

Xiangdong He of Westborough MA (US)

Shardul Patel of North Reading MA (US)

Robert C. Lindberg of Rockport MA (US)

SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DISTANCE - A simplified explanation of the abstract

This abstract first appeared for US patent application 17827204 titled 'SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DISTANCE

Simplified Explanation

- The patent application describes methods for optimizing the distance that an accelerator beam can be scanned horizontally. - The approach involves positioning two Faraday cups on opposite sides of the intended beam-scan area. - An ion beam is then scanned along the first and second sides of the intended beam-scan area. - The first and second Faraday cups measure the beam current of the ion beam at their respective positions. - Based on the measurements from the Faraday cups, an optimal scan distance for the ion beam across the intended beam-scan area is determined. - The invention aims to improve the efficiency and accuracy of accelerator beam scanning.


Original Abstract Submitted

Provided herein are approaches for optimizing a full horizontal scanned beam distance of an accelerator beam. In one approach, a method may include positioning a first Faraday cup along a first side of an intended beam-scan area, positioning a second Faraday cup along a second side of the intended beam-scan area, scanning an ion beam along the first and second sides of the intended beam-scan area, measuring a first beam current of the ion beam at the first Faraday cup and measuring a second beam current of the ion beam at the second Faraday cup, and determining an optimal scan distance of the ion beam across the intended beam-scan area based on the first beam current and the second beam current.