US Patent Application 17826225. SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME simplified abstract
Contents
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.==Inventor(s)==
[[Category:Chun-Hung Chen of Hsinchu (TW)]]
[[Category:Jhon-Jhy Liaw of Zhudong Township (TW)]]
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 17826225 titled 'SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
Simplified Explanation
The patent application describes a method for forming a semiconductor structure.
- The method involves creating two trenches in a first semiconductor material, with one trench being deeper than the other.
- A second semiconductor material is then formed in both trenches.
- The first portion of the second semiconductor material in the deeper trench and the first portion of the first semiconductor material below it are patterned into a first fin structure.
- Similarly, the second portion of the second semiconductor material in the shallower trench and the second portion of the first semiconductor material below it are patterned into a second fin structure.
- An isolation structure is then formed around both fin structures.
Original Abstract Submitted
A method for forming a semiconductor structure is provided. The method for forming the semiconductor structure includes forming a first trench and a second trench in a first semiconductor material. The first trench is deeper than the second trench. The method also includes forming a second semiconductor material in the first trench and the second trench, patterning a first portion of the second semiconductor material in the first trench and a first portion of the first semiconductor material below the first portion of the second semiconductor material into a first fin structure, and patterning a second portion of the second semiconductor material in the second trench and a second portion of the first semiconductor material below the second portion of the second semiconductor material into a second fin structure, and forming an isolation structure surrounding the first fin structure and the second fin structure.