US Patent Application 17804496. Systems and Methods for Plasma Process simplified abstract

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Systems and Methods for Plasma Process

Organization Name

Tokyo Electron Limited

Inventor(s)

Charles Schlechte of Austin TX (US)

Jianping Zhao of Austin TX (US)

John Carroll of Austin TX (US)

Peter Lowell George Ventzek of Austin TX (US)

Systems and Methods for Plasma Process - A simplified explanation of the abstract

This abstract first appeared for US patent application 17804496 titled 'Systems and Methods for Plasma Process

Simplified Explanation

The patent application describes a method for performing a plasma process using a signal generator and a plasma chamber.

  • The method involves generating a first RF signal at a first frequency using the signal generator.
  • The first RF signal is used to ignite a plasma within the plasma chamber.
  • Variable components of a matching circuit, which connects the signal generator to the plasma chamber, are adjusted based on feedback from the first RF signal.
  • Once the plasma is detected, the signal generator switches to output a third RF signal at the first frequency to sustain the plasma.
  • The matching circuit remains in fixed positions during the plasma process.
  • The sustained plasma is used to process a substrate loaded into the plasma chamber.


Original Abstract Submitted

A method of performing a plasma process includes generating, at an output of a signal generator, a first RF signal at a first frequency. The signal generator is coupled to a plasma chamber through a matching circuit. Based on a feedback from the first RF signal, variable components of the matching circuit are moved to fixed positions. A second RF signal is generated at a second frequency at the output of the signal generator to ignite a plasma within the plasma chamber. In response to detecting the plasma, the signal generator switches to output a third RF signal at the first frequency to sustain the plasma, which is configured to process a substrate loaded into the plasma chamber while holding the matching circuit at the fixed positions.

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