US Patent Application 17752730. ON-LINE ANALYSIS SYSTEM AND METHOD FOR SPECIALTY GASSES simplified abstract
Contents
ON-LINE ANALYSIS SYSTEM AND METHOD FOR SPECIALTY GASSES
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.
Inventor(s)
Chiang Jeh Chen of Hsinchu (TW)
Chieh-Jan Huang of Hsinchu (TW)
ON-LINE ANALYSIS SYSTEM AND METHOD FOR SPECIALTY GASSES - A simplified explanation of the abstract
This abstract first appeared for US patent application 17752730 titled 'ON-LINE ANALYSIS SYSTEM AND METHOD FOR SPECIALTY GASSES
Simplified Explanation
- The patent application describes methods and systems for monitoring the quality of specialty fluids in real time. - The specialty fluids are stored in gas cabinets and the monitoring is done using an analyzer and sampler. - The analyzer and sampler perform tests on the specialty fluids to determine their quality. - The data collected by the analyzer and sampler is stored and processed using an online data system. - The processed data is used to determine if the specialty fluids are suitable for use in workpiece processing tools. - The collected data is compared to manufacturer technical specifications to ensure the quality of the specialty fluids provided by the manufacturer.
Original Abstract Submitted
The present disclosure includes methods and systems for monitoring real time quality of specialty fluids within one or more specialty fluid containers stored within one or more gas cabinets. The methods and systems monitoring the real time quality of the specialty fluids may utilize an analyzer and sampler to perform one or more tests on the specialty fluids to determine the quality of the specialty fluids in real time. The data collected by the analyzer and sampler may be stored on and processed with the on-line data system to determine if the quality of the specialty fluids is sufficient to be introduced to one or more workpiece processing tools for processing one or more workpieces. The data collected may be compared to a manufacturer technical specification with respect to the specialty fluid to determine if the manufacturer is providing specialty fluids of sufficient quality.
