US Patent Application 17737045. INSPECTION TOOL AND INSPECTION METHOD simplified abstract
Contents
INSPECTION TOOL AND INSPECTION METHOD
Organization Name
Inventor(s)
Jianyong Mo of Chandler AZ (US)
Liang Zhang of Chandler AZ (US)
INSPECTION TOOL AND INSPECTION METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 17737045 titled 'INSPECTION TOOL AND INSPECTION METHOD
Simplified Explanation
The patent application describes an optical inspection tool that is used to inspect specimens with V-shaped grooves.
- The tool includes two image capture units, one directed towards the first angular surface of the groove and the other towards the second angular surface.
- The first image capture unit captures images of defects and contamination on the first angular surface, while the second image capture unit captures images of defects and contamination on the second angular surface.
Original Abstract Submitted
An optical inspection tool may include at least a first image capture unit and a second image capture unit for inspecting specimens having a substantially V-shaped grooves. The first image capture unit may be arranged in a first orientation so as to be directable towards a first angular surface of the V-shaped groove of each specimen. The second image capture unit may be arranged in a second orientation so as to be directable towards a second angular surface of the V-shaped groove of each specimen. The first image capture unit may be configured to capture images of defects and/or contamination on the first angular surface and the second image capture unit may be configured to capture images of defects and/or contamination on the second angular surface.
