Taiwan semiconductor manufacturing co., ltd. (20240128103). WAFER TRANSPORT SYSTEM AND TRANSPORTING METHOD USING THE SAME simplified abstract
Contents
- 1 WAFER TRANSPORT SYSTEM AND TRANSPORTING METHOD USING THE SAME
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 WAFER TRANSPORT SYSTEM AND TRANSPORTING METHOD USING THE SAME - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 How does this technology compare to existing wafer transportation systems in terms of speed and accuracy?
- 1.11 What are the potential maintenance requirements for the wafer transport device in this system?
- 1.12 Original Abstract Submitted
WAFER TRANSPORT SYSTEM AND TRANSPORTING METHOD USING THE SAME
Organization Name
taiwan semiconductor manufacturing co., ltd.
Inventor(s)
Qun Deng of Nanchang City (CN)
Guang Yang of Shanghai City (CN)
Qinhong Zhang of Shanghai City (CN)
Zihao Cao of Shanghai City (CN)
WAFER TRANSPORT SYSTEM AND TRANSPORTING METHOD USING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240128103 titled 'WAFER TRANSPORT SYSTEM AND TRANSPORTING METHOD USING THE SAME
Simplified Explanation
The patent application describes a method for transporting wafers using a control module and a wafer transport device. The method involves receiving an indication of wafer transporting, calculating a route for transporting a wafer carrier, moving the wafer transport device to a stocker storing the wafer carrier, performing a safety monitoring process during movement, stopping the wafer transport device in front of the stocker, and identifying the wafer carrier loaded on the device.
- Receiving indication of wafer transporting
- Calculating route for wafer carrier transport
- Moving wafer transport device to stocker
- Performing safety monitoring during movement
- Stopping wafer transport device in front of stocker
- Identifying wafer carrier loaded on device
Potential Applications
This technology could be applied in semiconductor manufacturing facilities where precise and safe transportation of wafers is crucial.
Problems Solved
This technology solves the problem of efficiently and safely transporting wafers within a manufacturing facility, reducing the risk of damage or contamination.
Benefits
The benefits of this technology include improved efficiency, reduced risk of damage to wafers, and enhanced safety during the transportation process.
Potential Commercial Applications
One potential commercial application of this technology is in semiconductor fabrication plants, where it can streamline the wafer transportation process and improve overall production efficiency.
Possible Prior Art
One possible prior art for this technology could be automated guided vehicles (AGVs) used in manufacturing facilities for transporting materials. These systems are designed to move materials safely and efficiently within a facility.
Unanswered Questions
How does this technology compare to existing wafer transportation systems in terms of speed and accuracy?
This article does not provide a direct comparison between this technology and existing wafer transportation systems in terms of speed and accuracy. Further research or testing may be needed to determine the specific advantages of this method over others.
What are the potential maintenance requirements for the wafer transport device in this system?
The article does not address the potential maintenance requirements for the wafer transport device in this system. Understanding the maintenance needs of the system is crucial for ensuring its long-term reliability and efficiency.
Original Abstract Submitted
a method includes receiving, by a control module of a wafer transport system, an indication of wafer transporting; calculating, by the control module, a route for transporting a first wafer carrier according to the indication; moving, by a control unit of a wafer transport device of the wafer transport system, the wafer transport device to a first stocker storing the first wafer carrier along the route; performing, by the control unit, a safety monitoring process during a movement of the wafer transport device; stopping, by the control unit, the wafer transport device in front of the first stocker; and identifying, by an identification device of the wafer transport device, the first wafer carrier loaded on a rack of the wafer transport device.
