Samsung electronics co., ltd. (20240124972). CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR MEASURING PRECURSOR REMAINING AMOUNT THEREOF simplified abstract
Contents
- 1 CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR MEASURING PRECURSOR REMAINING AMOUNT THEREOF
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR MEASURING PRECURSOR REMAINING AMOUNT THEREOF - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Original Abstract Submitted
CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR MEASURING PRECURSOR REMAINING AMOUNT THEREOF
Organization Name
Inventor(s)
CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR MEASURING PRECURSOR REMAINING AMOUNT THEREOF - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240124972 titled 'CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR MEASURING PRECURSOR REMAINING AMOUNT THEREOF
Simplified Explanation
The patent application describes a canister that supplies a precursor to a processing chamber using a carrier gas and a sublimated gas of a solid precursor. The canister includes a precursor accommodating tray that holds the solid precursor and at least one piezoelectric transducer that vibrates the tray or measures a resonance frequency.
- Canister supplies precursor to processing chamber
- Includes first valve for carrier gas and second valve for sublimated gas
- Precursor accommodating tray holds solid precursor
- Piezoelectric transducer vibrates tray or measures resonance frequency
Potential Applications
The technology could be used in semiconductor manufacturing, chemical vapor deposition processes, and thin film deposition applications.
Problems Solved
This technology helps in delivering precise amounts of solid precursors to processing chambers, improving process control and efficiency.
Benefits
The canister allows for controlled and efficient delivery of solid precursors, reducing waste and improving the quality of the final product.
Potential Commercial Applications
"Advanced Canister Technology for Semiconductor Manufacturing"
Possible Prior Art
There are existing canister systems for precursor delivery in semiconductor manufacturing, but the use of piezoelectric transducers for vibrating the precursor tray is a novel feature.
Unanswered Questions
How does the piezoelectric transducer affect the delivery of the precursor?
The piezoelectric transducer vibrates the precursor accommodating tray, which may help in dislodging the solid precursor for more efficient delivery.
What is the significance of measuring the resonance frequency in this system?
Measuring the resonance frequency can provide valuable information about the state of the precursor and the efficiency of the delivery system.
Original Abstract Submitted
a canister supplying a precursor to a processing chamber includes a body, a first valve introducing a carrier gas into the body, a second valve discharging a sublimated gas of a solid precursor into a processing chamber, a precursor accommodating tray accommodating the solid precursor, and at least one piezoelectric transducer at least one of vibrating the precursor accommodating tray or measuring a resonance frequency.
