Samsung electronics co., ltd. (20240121877). EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE simplified abstract
Contents
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
Organization Name
Inventor(s)
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240121877 titled 'EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
Simplified Explanation
The patent application describes an extreme ultraviolet light source device with a chamber, condensing mirror, droplet supply, light source, catch, and exhaust ports.
- Chamber with condensing mirror: The device includes a chamber with a condensing mirror arranged on the lower surface to focus extreme ultraviolet light.
- Droplet supply and catch: A droplet supply unit adjacent to the chamber supplies droplets to generate extreme ultraviolet light, while a catch opposite to the droplet supply receives the discharged droplets.
- Light source: The device utilizes a light source that generates extreme ultraviolet light by oscillating a laser.
- Exhaust ports: The chamber has first and second exhaust ports on the upper surface, connected to exhaust systems to remove unwanted gases and maintain a clean environment.
- Potential applications of this technology:
- Semiconductor manufacturing - Lithography - Microelectronics
- Problems solved by this technology:
- Providing a stable and efficient extreme ultraviolet light source - Controlling droplet supply for consistent light generation - Ensuring a clean environment for optimal performance
- Benefits of this technology:
- Improved precision and resolution in manufacturing processes - Enhanced performance in microelectronics - Increased productivity and cost-effectiveness
- Potential commercial applications of this technology:
- Semiconductor industry - Research institutions - Advanced manufacturing facilities
- Possible prior art:
- Previous extreme ultraviolet light source devices with different configurations - Research on droplet-based light generation technologies
Questions:
1. How does the device ensure the precise delivery of droplets for generating extreme ultraviolet light?
Answer: The device includes a droplet supply unit and a catch to control the supply and discharge of droplets, ensuring consistent and efficient light generation.
2. What are the specific advantages of using a laser-based light source for generating extreme ultraviolet light in this device?
Answer: Using a laser-based light source allows for precise control and high energy efficiency in generating extreme ultraviolet light, leading to improved performance and reliability in various applications.
Original Abstract Submitted
an extreme ultraviolet light source device includes a chamber having a lower surface on which a condensing mirror is arranged, an intermediate focus, and a side surface between the lower surface and an upper surface a first exhaust port and a second exhaust port on the upper surface and spaced apart from the intermediate focus; a droplet supply adjacent to the side surface of the chamber, and configured to supply a droplet to generate the extreme ultraviolet light into the chamber; a light source configured to generate the extreme ultraviolet light by oscillating a laser; a catch adjacent to the side surface of the chamber, opposite to the droplet supply, and configured to receive the droplet discharged from the droplet supply unit; a first exhaust connected to the first exhaust port; and a second exhaust adjacent to the upper surface of the chamber, and connected to the second exhaust port.
