SEMICONDUCTOR CARRIER STORAGE SYSTEM, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE SAME, AND SEMICONDUCTOR FABRICATION METHOD USING THE SAME: abstract simplified (17972187)

• This abstract for appeared for patent application number 17972187 Titled 'SEMICONDUCTOR CARRIER STORAGE SYSTEM, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE SAME, AND SEMICONDUCTOR FABRICATION METHOD USING THE SAME'

Simplified Explanation

The abstract describes a semiconductor carrier storage system used in semiconductor fabrication processes. The system includes storage ports for holding semiconductor carriers, a shuttle rail for moving carriers horizontally, an internal carrier shuttle that transfers carriers to the storage ports, and an upper transport for receiving carriers from an overhead hoist transport. The internal carrier shuttle consists of a shuttle body, a transfer wheel, a gripper for holding carriers, and a hoist for vertically moving the gripper.

Original Abstract Submitted

Disclosed are semiconductor carrier storage systems, semiconductor fabrication systems including the same, and/or semiconductor fabrication methods using the same. The semiconductor carrier storage system comprises storage ports each of which accommodates a semiconductor carrier, a shuttle rail that extends in a horizontal direction on a side of the storage ports, an internal carrier shuttle that moves along the shuttle rail and transfers a semiconductor carrier to each of the storage ports, and an upper transport that receives the semiconductor carrier from an overhead hoist transport (OHT). The internal carrier shuttle includes a shuttle body coupled to the shuttle rail, a transfer wheel that connects the shuttle body to the shuttle rail, a gripper that holds the semiconductor carrier, and a hoist that vertically extends between the shuttle body and the gripper and drives the gripper to vertically move.