Kokusai Electric Corporation patent applications published on March 21st, 2024

Summary of the patent applications from Kokusai Electric Corporation on March 21st, 2024

Kokusai Electric Corporation has recently filed patents for innovative techniques in substrate processing apparatus. These patents focus on efficient failure identification and recovery, precise editing of setting values, controlled cooling of substrates, and uniform film formation.

Summary in bullet points:

• Patents involve techniques for failure identification, setting value editing, substrate cooling, and film formation.
• Techniques aim to improve efficiency, accuracy, and control in substrate processing operations.
• Applications include semiconductor manufacturing, solar panel production, and thin film deposition.

Notable applications:

• Semiconductor manufacturing
• Solar panel production
• Thin film deposition

Patent applications for Kokusai Electric Corporation on March 21st, 2024

VAPORIZER, PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE (18525207)

Main Inventor

Gen LI

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS (18226854)

Main Inventor

Masahiro TAKAHASHI

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM (18354220)

Main Inventor

Tadashi TAKASAKI

CONVERSION PIPE ARRANGEMENT, SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE (18354264)

Main Inventor

Takuto SHOJI

Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device (18519750)

Main Inventor

Takeshi YASUI

SUBSTRATE PROCESSING APPARATUS, PLASMA GENERATION APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM (18471002)

Main Inventor

Yukinori ABURATANI

SUBSTRATE PROCESSING APPARATUS, PROCESSING METHOD, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM (18526472)

Main Inventor

Akinori TANAKA

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM (18357293)

Main Inventor

Kimihiko Nakatani

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM (18469687)

Main Inventor

Katsuhiko Yamamoto

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM (18463529)

Main Inventor

Shinichiro MORI

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM (18468780)

Main Inventor

Yuri TAKEBAYASHI