International business machines corporation (20240113023). Self-Aligned Wafer Backside Gate Signal with Airgap simplified abstract

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Self-Aligned Wafer Backside Gate Signal with Airgap

Organization Name

international business machines corporation

Inventor(s)

Tao Li of Slingerlands NY (US)

Ruilong Xie of Niskayuna NY (US)

Nicolas Jean Loubet of Guilderland NY (US)

Julien Frougier of Albany NY (US)

Self-Aligned Wafer Backside Gate Signal with Airgap - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240113023 titled 'Self-Aligned Wafer Backside Gate Signal with Airgap

Simplified Explanation

The semiconductor device described in the abstract includes a backside power line, a backside signal line, and an airgap between the two lines. The power line is located under a p-channel field effect transistor region and an n-channel field effect transistor region, while the signal line is located between the p-channel and n-channel regions.

  • Backside power line located under p-channel and n-channel regions
  • Backside signal line located between p-channel and n-channel regions
  • Airgap between backside power line and backside signal line

Potential Applications

The technology described in this patent application could be applied in various semiconductor devices, such as integrated circuits, microprocessors, and memory chips.

Problems Solved

This technology helps in reducing interference between the power line and signal line, improving the overall performance and reliability of the semiconductor device.

Benefits

The airgap between the power line and signal line helps in minimizing crosstalk and noise, leading to enhanced signal integrity and efficiency of the device.

Potential Commercial Applications

This technology could find applications in the electronics industry, particularly in the development of high-performance computing devices and communication systems.

Possible Prior Art

One possible prior art could be the use of isolation techniques to reduce interference between power and signal lines in semiconductor devices.

Unanswered Questions

How does the airgap affect the overall size of the semiconductor device?

The size of the semiconductor device may be impacted by the inclusion of the airgap between the power and signal lines. This could affect the overall footprint and layout of the device.

What materials are used to create the airgap in the semiconductor device?

The materials used to create the airgap between the power and signal lines could play a crucial role in determining the effectiveness of the isolation and the overall performance of the device.


Original Abstract Submitted

a semiconductor device includes a backside power line located under a p-channel field effect transistor region and an n-channel field effect transistor region; a backside signal line located between the p-channel field effect transistor region and the n-channel field effect transistor region; and an airgap between the backside power line and the backside signal line.