EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME: abstract simplified (18133225)

• This abstract for appeared for patent application number 18133225 Titled 'EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME'

Simplified Explanation

The abstract describes an exposure apparatus used in the manufacturing process of electronic devices. It consists of a stage where a target substrate is placed, and this stage has multiple holes. The apparatus also includes a light source that emits light onto the stage. The target substrate is supported by a set of support pins, which includes a fixed support pin and a first variable support pin. The fixed support pin remains in a fixed position, while the first variable support pin can move back and forth in a specific direction. The holes on the stage consist of a pair of first holes, which are penetrated by the fixed support pin and are arranged side by side at a certain distance along the movement direction of the first variable support pin. There is also a second hole, which is penetrated by the first variable support pin and is located between the pair of first holes.

Original Abstract Submitted

An exposure apparatus includes a stage on which a target substrate is loaded and in which a plurality of holes are defined, a light source part radiating light to the stage, and a plurality of support pins disposed to penetrate the plurality of holes and supporting the target substrate, the plurality of support pins include a fixed support pin whose position is fixed in a plan view and a first variable support pin capable of reciprocating movement in a first direction, and the plurality of holes include a pair of first holes penetrated by the fixed support pin and arranged side by side at a predetermined interval along the first direction and a second hole penetrated by the first variable support pin and disposed between the pair of first holes.