Canon kabushiki kaisha (20240126182). EXPOSURE APPARATUS, CONTROL METHOD OF EXPOSURE APPARATUS, INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD simplified abstract
Contents
- 1 EXPOSURE APPARATUS, CONTROL METHOD OF EXPOSURE APPARATUS, INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 EXPOSURE APPARATUS, CONTROL METHOD OF EXPOSURE APPARATUS, INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Original Abstract Submitted
EXPOSURE APPARATUS, CONTROL METHOD OF EXPOSURE APPARATUS, INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD
Organization Name
Inventor(s)
EXPOSURE APPARATUS, CONTROL METHOD OF EXPOSURE APPARATUS, INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240126182 titled 'EXPOSURE APPARATUS, CONTROL METHOD OF EXPOSURE APPARATUS, INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD
Simplified Explanation
The patent application describes an apparatus with a control unit that adjusts imaging characteristics of an optical system by measuring and predicting changes in these characteristics over multiple lots.
- The control unit measures imaging characteristics of the optical system over several lots.
- It uses a prediction formula, specifically a polynomial function, to fit the measurement data and predict changes caused by variations in illumination mode or original between lots.
- The control unit determines the polynomial function term to ensure the fitting residual falls within an acceptable range.
Potential Applications
This technology could be applied in industries where precise imaging is crucial, such as semiconductor manufacturing, medical imaging, and quality control in production processes.
Problems Solved
This innovation addresses the challenge of maintaining consistent imaging quality across different lots, reducing the need for manual adjustments and ensuring accurate and reliable results.
Benefits
- Improved imaging quality and consistency - Reduction in manual adjustments and calibration time - Enhanced efficiency and accuracy in production processes
Potential Commercial Applications
"Optical System Adjustment Apparatus for Imaging Quality Control" could find applications in semiconductor manufacturing equipment, medical imaging devices, and industrial inspection systems.
Possible Prior Art
One possible prior art could be the use of predictive algorithms in optical systems to adjust imaging characteristics based on historical data and trends.
What is the accuracy rate of the prediction coefficient in the formula used by the control unit?
The accuracy rate of the prediction coefficient in the formula used by the control unit is not specified in the abstract.
How does the control unit handle unexpected variations in imaging characteristics that are not accounted for in the prediction formula?
The abstract does not mention how the control unit handles unexpected variations in imaging characteristics that are not accounted for in the prediction formula.
Original Abstract Submitted
an apparatus includes a control unit configured to control an adjustment unit for adjusting imaging characteristics of an optical system. in a period spanning a plurality of lots, the control unit measures imaging characteristics of the optical system, and decides a prediction coefficient in a prediction formula to fit the prediction formula to measurement data obtained by the measurement in the period spanning the plurality of lots. the prediction formula is a polynomial function including a term representing a change in measurement value of the imaging characteristics caused by changing at least one of an illumination mode and an original between lots. the control unit decides the term of the polynomial function such that a fitting residual falls within an allowable range.
