Applied Materials, Inc. patent applications published on October 5th, 2023

Summary of the patent applications from Applied Materials, Inc. on October 5th, 2023

• Applied Materials, Inc. has recently filed patents related to various technologies and methods in the field of semiconductor processing and device manufacturing.
• These patents include methods and devices for creating uniform layers on a substrate for piezoelectric applications, an organic light-emitting diode (OLED) deposition system, technology related to electroluminescent devices and displays, manufacturing a dielectric barrier discharge (DBD) structure, a type of transistor with a vertical drift region, methods of semiconductor processing to increase corrosion resistance, assemblies and systems for monitoring substrate characteristics, techniques for selective deposition of materials on metallic surfaces, a method and system for calibrating temperature-based measurements in a manufacturing system, and a link chamber used in multi-chamber processing tools or systems.
• Notable applications of these patents include:

 * Improved quality and properties of piezoelectric materials through uniform layer deposition.
 * Efficient deposition of organic material layers onto a workpiece in a vacuum environment.
 * Enhanced performance and refractive index control in electroluminescent devices and displays.
 * Creation of a DBD structure with patterned electrode layers for various applications.
 * Transistors with vertical drift regions for improved performance and functionality.
 * Methods to increase corrosion resistance of metal substrates in semiconductor processing.
 * Monitoring and control of substrate characteristics during processing.
 * Selective deposition of materials on metallic surfaces using metal-carbonyl compounds.
 * Calibration of temperature-based measurements in manufacturing systems for accurate process control.
 * Link chambers for seamless substrate transfer in multi-chamber processing tools or systems.

Patent applications for Applied Materials, Inc. on October 5th, 2023

CERAMIC ENGINEERING BY GRADING MATERIALS (18112988)

Inventor Arvinder Chadha

ELECTROMAGNET PULSING EFFECT ON PVD STEP COVERAGE (17737361)

Inventor Kevin KASHEFI

GAS INJECTION FOR DE-AGGLOMERATION IN PARTICLE COATING REACTOR (18205273)

Inventor Jonathan Frankel

PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF (17855031)

Inventor Srikanth Krishnamurthy

METHODS OF PREVENTING METAL CONTAMINATION BY CERAMIC HEATER (17709931)

Inventor Yongjing Lin

CHEMICAL-DOSE SUBSTRATE DEPOSITION MONITORING (17709304)

Inventor Albert Barrett Hicks, III

METHODS FOR DEPOSITING SACRIFICIAL COATINGS ON AEROSPACE COMPONENTS (18200497)

Inventor Sukti CHATTERJEE

ELECTROPLATING SYSTEMS AND METHODS WITH INCREASED METAL ION CONCENTRATIONS (18129999)

Inventor Paul R. McHugh

ELECTROPLATING SYSTEMS AND METHODS WITH INCREASED METAL ION CONCENTRATIONS (18130004)

Inventor Paul R. McHugh

METHODS FOR HIGH-RESOLUTION, STABLE MEASUREMENT OF PITCH AND ORIENTATION IN OPTICAL GRATINGS (18118269)

Inventor Yangyang SUN

PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF (17855019)

Inventor Vijay Parkhe

PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF (17855013)

Inventor Arvinder Manmohan Singh Chadha

LEAK DETECTION FOR GAS STICKS (18190418)

Inventor Yen-Kun Wang

METHODS TO IMPROVE PROCESS WINDOW AND RESOLUTION FOR DIGITAL LITHOGRAPHY WITH AUXILIARY FEATURES (18006259)

Inventor Chi-Ming TSAI

USING DEEP REINFORCEMENT LEARNING FOR TIME CONSTRAINT MANAGEMENT AT A MANUFACTURING SYSTEM (18130491)

Inventor Harel Yedidsion

CHEMICAL-DOSE SUBSTRATE DEPOSITION MONITORING (17709303)

Inventor Albert Barrett Hicks, III

TRAINING A MACHINE LEARNING SYSTEM TO DETECT AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE OF IMAGES (18206353)

Inventor Sidney P. Huey

GENERATING SYNTHETIC MICROSPY IMAGES OF MANUFACTURED DEVICES (17710728)

Inventor Abhinav Kumar

RADIO FREQUENCY SOURCE FOR INDUCTIVELY COUPLED AND CAPACITIVELY COUPLED PLASMAS IN SUBSTRATE PROCESSING CHAMBERS (17693409)

Inventor Abdul Aziz Khaja

PLASMA SHOWERHEAD WITH IMPROVED UNIFORMITY (17712046)

Inventor Chaowei Wang

ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS (18206514)

Inventor Prashant Kumar KULSHRESHTHA

GAP FILL ENHANCEMENT WITH THERMAL ETCH (17887292)

Inventor Kai WU

METHODS, SYSTEMS, AND APPARATUS FOR PROCESSING SUBSTRATES USING ONE OR MORE AMORPHOUS CARBON HARDMASK LAYERS (18206037)

Inventor Krishna NITTALA

MODULAR MULTI-CHAMBER PROCESSING TOOL HAVING LINK CHAMBER FOR ULTRA HIGH VACCUM PROCESSES (17692969)

Inventor Robert Irwin DECOTTIGNIES

TEMPERATURE-BASED METROLOGY CALIBRATION AT A MANUFACTURING SYSTEM (17710779)

Inventor Shifang Li

Metal Surface Blocking Molecules for Selective Deposition (17864552)

Inventor Muthukumar Kaliappan

CHEMICAL-DOSE SUBSTRATE DEPOSITION MONITORING (17709301)

Inventor Albert Barrett Hicks, III

COATINGS WITH DIFFUSION BARRIERS FOR CORROSION AND CONTAMINATION PROTECTION (17713350)

Inventor Jordi Perez Mariano

STRUCTURE AND FABRICATION METHOD OF HIGH VOLTAGE MOSFET WITH A VERTICAL DRIFT REGION (17714093)

Inventor Changseok KANG

METHODS OF MANUFACTURING PLASMA GENERATING CELLS FOR A PLASMA SOURCE (17853584)

Inventor David John Jorgensen

ORGANIC ELECTROLUMINESCENT DEVICES WITH IMPROVED OPTICAL OUT-COUPLING EFFICIENCIES (18021856)

Inventor Chung-chia CHEN

IN-LINE MONITORING OF OLED LAYER THICKNESS AND DOPANT CONCENTRATION (18207549)

Inventor Yeishin Tung

DEPOSITION METHODS AND APPARATUS FOR PIEZOELECTRIC APPLICATIONS (18022652)

Inventor Abhijeet Laxman SANGLE