ACOUSTIC WAVE DEVICE: abstract simplified (18208918)

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  • This abstract for appeared for patent application number 18208918 Titled 'ACOUSTIC WAVE DEVICE'

Simplified Explanation

The abstract describes an acoustic wave device that consists of several layers. It includes a support substrate with an intermediate layer, a piezoelectric layer, and an IDT electrode. The support also has a cavity portion. The piezoelectric layer has a membrane portion that overlaps the cavity portion. The IDT electrode is located in the membrane portion. Additionally, there is a spacer layer in the support, which is made of a different material than the piezoelectric layer and the intermediate layer. The spacer layer is situated in a section of the support that is not part of the cavity portion.


Original Abstract Submitted

An acoustic wave device includes a support including support substrate and an intermediate layer on the support substrate, a piezoelectric layer on the intermediate layer, and an IDT electrode on the piezoelectric layer. A cavity portion is provided in the support. The piezoelectric layer includes a membrane portion overlapping the cavity portion in a plan view. At least a portion of the IDT electrode is in the membrane portion. A spacer layer is in the support and made of a material different from materials of the piezoelectric layer and the intermediate layer. The spacer layer is located in a portion other than the cavity portion.

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