20240087921.LIGHT IRRADIATION APPARATUS, SUBSTRATE DEBONDING SYSTEM INCLUDING THE SAME, AND SUBTRATED DEBONDING METHOD USING THE SAME simplified abstract (samsung electronics co., ltd.)
Contents
- 1 LIGHT IRRADIATION APPARATUS, SUBSTRATE DEBONDING SYSTEM INCLUDING THE SAME, AND SUBTRATED DEBONDING METHOD USING THE SAME
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 LIGHT IRRADIATION APPARATUS, SUBSTRATE DEBONDING SYSTEM INCLUDING THE SAME, AND SUBTRATED DEBONDING METHOD USING THE SAME - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Original Abstract Submitted
LIGHT IRRADIATION APPARATUS, SUBSTRATE DEBONDING SYSTEM INCLUDING THE SAME, AND SUBTRATED DEBONDING METHOD USING THE SAME
Organization Name
Inventor(s)
LIGHT IRRADIATION APPARATUS, SUBSTRATE DEBONDING SYSTEM INCLUDING THE SAME, AND SUBTRATED DEBONDING METHOD USING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240087921 titled 'LIGHT IRRADIATION APPARATUS, SUBSTRATE DEBONDING SYSTEM INCLUDING THE SAME, AND SUBTRATED DEBONDING METHOD USING THE SAME
Simplified Explanation
The abstract describes a light irradiation apparatus with a stage for supporting a substrate and a light emitting diode (LED) module with LEDs arranged in different directions.
- The apparatus includes a stage for holding a substrate and a LED module with multiple LEDs.
- Some LEDs are arranged in one direction, while others are placed in a different direction intersecting the first one.
Potential Applications
The technology can be used in various industries such as semiconductor manufacturing, photolithography, and medical devices for precise light irradiation processes.
Problems Solved
This technology solves the problem of uniform and controlled light irradiation on substrates, leading to improved efficiency and accuracy in processes like photoresist exposure and curing.
Benefits
- Enhanced precision in light irradiation processes - Increased efficiency in substrate treatment - Cost-effective solution compared to traditional light sources
Potential Commercial Applications
"LED Light Irradiation Apparatus for Semiconductor Manufacturing" can be a suitable title for this section. This technology can be applied in semiconductor fabrication facilities, research laboratories, and medical device manufacturing companies.
Possible Prior Art
There may be existing patents or publications related to LED-based light irradiation systems for various applications. Researching prior art in this field can provide insights into the novelty and uniqueness of this specific LED module arrangement.
Unanswered Questions
How does the arrangement of LEDs in different directions affect the overall light distribution and intensity on the substrate?
The abstract mentions LEDs arranged in different directions, but it does not elaborate on how this configuration impacts the light distribution and intensity during irradiation processes.
What specific types of substrates or materials can benefit the most from this LED module arrangement?
The abstract does not specify the types of substrates or materials that would benefit the most from this light irradiation apparatus. Understanding the compatibility and effectiveness of this technology with different materials can help in identifying potential applications and market segments.
Original Abstract Submitted
a light irradiation apparatus including a stage configured to support a substrate; and a light emitting diode (led) module spaced apart from the stage, wherein the led module includes a plurality of leds, wherein some of the plurality of leds are arranged in a first direction, and wherein others of the plurality of leds are provided in a second direction, the second direction intersecting the first direction.
