20240055287. SUBSTRATE CONTAINER WITH BUILT-IN NEGATIVE PRESSURE CAVITY simplified abstract (GUDENG PRECISION INDUSTRIAL CO., LTD.)

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SUBSTRATE CONTAINER WITH BUILT-IN NEGATIVE PRESSURE CAVITY

Organization Name

GUDENG PRECISION INDUSTRIAL CO., LTD.

Inventor(s)

Ming-Chien Chiu of New Taipei City (TW)

Chia-Ho Chuang of New Taipei City (TW)

Kuo-Hua Lee of New Taipei City (TW)

Xin-Yuan Huang of New Taipei City (TW)

En-Nien Shen of New Taipei City (TW)

Jyun-Ming Lyu of New Taipei City (TW)

SUBSTRATE CONTAINER WITH BUILT-IN NEGATIVE PRESSURE CAVITY - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240055287 titled 'SUBSTRATE CONTAINER WITH BUILT-IN NEGATIVE PRESSURE CAVITY

Simplified Explanation

The invention is a substrate container with a shell and a cover member. The shell has an accommodation space, a bottom, and at least one exhaust hole adjacent to an opening. The cover member is mounted to the bottom, creating a negative pressure cavity above and communicating with the exhaust hole. An elongated exhaust hole above the negative pressure cavity communicates with the accommodation space, allowing gas to be exhausted sequentially.

  • Shell with accommodation space and exhaust hole
  • Cover member creating negative pressure cavity
  • Elongated exhaust hole for sequential gas exhaustion

Potential Applications

  • Semiconductor manufacturing
  • Chemical processing
  • Pharmaceutical industry

Problems Solved

  • Contamination of substrates
  • Efficient gas exhaust
  • Maintaining controlled environment

Benefits

  • Improved substrate quality
  • Enhanced process efficiency
  • Reduced risk of contamination


Original Abstract Submitted

the invention discloses a substrate container including a shell and a cover member. the shell defines an accommodation space, and has a bottom and at least one exhaust hole formed on the bottom, wherein the exhaust hole is adjacent to an opening of the shell. the cover member is mounted to the bottom of the shell, and the cover member and the bottom of the shell define a negative pressure cavity above and communicating with the at least one exhaust hole. an elongated exhaust hole is defined above the negative pressure cavity, and communicates with the negative pressure cavity and the accommodation space. a gas in the accommodation space is exhausted sequentially from the elongated exhaust hole, the negative pressure cavity and the at least one exhaust hole.

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