20240020821. DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD, AND DEFECT INSPECTION COMPUTER PROGRAM PRODUCT simplified abstract (KABUSHIKI KAISHA TOSHIBA)
Contents
DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD, AND DEFECT INSPECTION COMPUTER PROGRAM PRODUCT
Organization Name
Inventor(s)
Akira Moriya of Kawasaki Kanagawa (JP)
DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD, AND DEFECT INSPECTION COMPUTER PROGRAM PRODUCT - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240020821 titled 'DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD, AND DEFECT INSPECTION COMPUTER PROGRAM PRODUCT
Simplified Explanation
The patent application describes a defect inspection device that includes several units for acquiring and generating images, as well as controlling the defect estimation process. Here is a simplified explanation of the abstract:
- The acquisition unit captures an inspection image and a reference image of the inspection target.
- The evaluation-target-image-generation unit combines the reference and inspection images to generate an evaluation target image.
- The defect-estimation-image-generation unit generates a defect estimation image by assigning a defect estimation value to each pixel in a defect candidate area within the evaluation target image.
- The iteration-control unit controls the defect-estimation-image-generation unit to iterate the defect estimation image generation process using the defect estimation image as the new evaluation target image.
Potential Applications:
- Quality control in manufacturing processes: This defect inspection device can be used to identify and estimate defects in products during the manufacturing process, ensuring high-quality output.
- Semiconductor industry: The device can be applied to inspect and estimate defects in semiconductor wafers, improving the yield and reliability of electronic components.
Problems Solved:
- Efficient defect estimation: The device automates the process of defect estimation by generating an evaluation target image and iteratively refining the defect estimation image, reducing the time and effort required for manual inspection.
- Accurate defect identification: By analyzing consecutive pixels in the defect candidate area, the device can accurately identify and estimate defects, minimizing false positives and false negatives.
Benefits:
- Improved inspection efficiency: The automated defect estimation process speeds up the inspection process, allowing for faster production cycles and reduced costs.
- Enhanced product quality: By accurately identifying and estimating defects, the device helps manufacturers maintain high-quality standards and reduce the number of defective products reaching the market.
- Cost savings: The device eliminates the need for manual inspection, reducing labor costs and increasing productivity.
Original Abstract Submitted
according to one embodiment, a defect inspection device includes an acquisition unit, an evaluation-target-image-generation unit, a defect-estimation-image-generation unit, and an iteration-control unit. the acquisition unit acquires an inspection image obtained by imaging an inspection target and a reference image of the inspection target in design. the evaluation-target-image-generation unit generates an evaluation target image according to the reference and inspection images. the defect-estimation-image-generation unit generates a defect estimation image with a defect estimation value being defined for each pixel based on a feature of a defect candidate area corresponding to an image area of consecutive pixels each of which has a pixel value equal to or greater than a first threshold value and which are included in the evaluation target image. the iteration-control unit controls the defect-estimation-image-generation unit to iterate defect estimation image generation processing using the defect estimation image as the evaluation target image.
