20240019688. MEMS MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING PROCESS THEREOF simplified abstract (STMICROELECTRONICS S.r.l.)

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MEMS MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING PROCESS THEREOF

Organization Name

STMICROELECTRONICS S.r.l.

Inventor(s)

Massimiliano Merli of Stradella (IT)

Roberto Carminati of Piancogno (BS) (IT)

Nicolo' Boni of Mountain View CA (US)

Sonia Costantini of Missaglia (IT)

Carlo Luigi Prelini of Seveso (IT)

MEMS MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING PROCESS THEREOF - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240019688 titled 'MEMS MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING PROCESS THEREOF

Simplified Explanation

The abstract describes a micro-electro-mechanical mirror device that includes a fixed structure, a tiltable structure, a reflecting surface, and an actuation structure. The actuation structure is formed by a pair of actuation arms that cause rotation of the tiltable structure. The actuation arms are elastically coupled to the tiltable structure through elastic coupling elements. The bearing structure of each actuation arm is formed by a soft region of a first material, while the elastic coupling elements are formed by a bearing layer of a second material with greater stiffness.

  • The patent describes a micro-electro-mechanical mirror device with a fixed structure, a tiltable structure, a reflecting surface, and an actuation structure.
  • The actuation structure is formed by a pair of actuation arms that rotate the tiltable structure.
  • The actuation arms are elastically coupled to the tiltable structure through elastic coupling elements.
  • The bearing structure of each actuation arm is made of a soft region of a first material.
  • The elastic coupling elements are made of a bearing layer of a second material with greater stiffness.

Potential applications of this technology:

  • Optical systems: The micro-electro-mechanical mirror device can be used in optical systems for beam steering, image stabilization, and adaptive optics.
  • Microscopy: The device can be used in microscopy systems for precise control of the reflecting surface, allowing for improved imaging and focusing capabilities.
  • Laser systems: The mirror device can be integrated into laser systems for beam control and manipulation, enabling precise targeting and alignment.

Problems solved by this technology:

  • Precision control: The micro-electro-mechanical mirror device allows for precise control of the reflecting surface, enabling accurate beam steering and image stabilization.
  • Miniaturization: The device is designed to be compact and can be integrated into small-scale systems, making it suitable for applications where space is limited.
  • Versatility: The tiltable structure and actuation arms provide flexibility in adjusting the reflecting surface, allowing for various applications in different fields.

Benefits of this technology:

  • Improved performance: The precise control offered by the mirror device enhances the performance of optical systems, microscopy, and laser systems, resulting in better image quality, beam control, and targeting accuracy.
  • Compact design: The compact size of the device allows for integration into small-scale systems, making it suitable for portable and space-constrained applications.
  • Versatile applications: The flexibility of the tiltable structure and actuation arms enables the device to be used in a wide range of applications, providing versatility and adaptability.


Original Abstract Submitted

disclosed herein is a micro-electro-mechanical mirror device having a fixed structure defining an external frame delimiting a cavity, a tiltable structure extending into the cavity, a reflecting surface carried by the tiltable structure and having a main extension in a horizontal plane, and an actuation structure coupled between the tiltable structure and the fixed structure. the actuation structure is formed by a first pair of actuation arms causing rotation of the tiltable structure around a first axis parallel to the horizontal plane. the actuation arms are elastically coupled to the tiltable structure through elastic coupling elements and are each formed by a bearing structure and a piezoelectric structure. the bearing structure of each actuation arm is formed by a soft region of a first material and the elastic coupling elements are formed by a bearing layer of a second material, the second material having greater stiffness than the first material.

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