20240009668. MICROFLUIDIC CHANNELS IN A SUBSTRATE WITH A SURFACE COVERED BY A LAYER STACK simplified abstract (GlobalFoundries U.S. Inc.)

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MICROFLUIDIC CHANNELS IN A SUBSTRATE WITH A SURFACE COVERED BY A LAYER STACK

Organization Name

GlobalFoundries U.S. Inc.

Inventor(s)

Ramsey Hazbun of Colchester VT (US)

Siva P. Adusumilli of South Burlington VT (US)

Mark Levy of Williston VT (US)

Bartlomiej Jan Pawlak of Leuven (BE)

MICROFLUIDIC CHANNELS IN A SUBSTRATE WITH A SURFACE COVERED BY A LAYER STACK - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240009668 titled 'MICROFLUIDIC CHANNELS IN A SUBSTRATE WITH A SURFACE COVERED BY A LAYER STACK

Simplified Explanation

The patent application describes structures and methods for forming a microfluidic channel. The structure includes a semiconductor substrate with a trench and a layer stack on top. The layer stack consists of a first layer, a second layer between the first layer and the substrate, and an opening that goes through both layers to the trench. Inside the opening, there is a third layer made of semiconductor material that obstructs the opening and creates a cavity within the trench.

  • The structure includes a semiconductor substrate with a trench and a layer stack on top.
  • The layer stack consists of a first layer, a second layer, and an opening that penetrates through both layers to the trench.
  • Inside the opening, there is a third layer made of semiconductor material.
  • The third layer obstructs the opening and defines a cavity within the trench.

Potential applications of this technology:

  • Microfluidic devices for biomedical research and diagnostics.
  • Lab-on-a-chip systems for chemical analysis and drug discovery.
  • Microscale fluid handling and manipulation in various industries, such as pharmaceuticals and biotechnology.

Problems solved by this technology:

  • Provides a structure for microfluidic channels that can be integrated with semiconductor substrates.
  • Enables precise control and manipulation of fluids at a microscale level.
  • Facilitates the development of miniaturized and portable analytical devices.

Benefits of this technology:

  • Improved efficiency and accuracy in fluid handling and analysis.
  • Integration with existing semiconductor fabrication processes.
  • Enables the development of compact and portable microfluidic devices.
  • Potential for automation and high-throughput analysis.


Original Abstract Submitted

structures for a microfluidic channel and methods of forming a structure for a microfluidic channel. the structure comprises a semiconductor substrate including a trench and a layer stack on the semiconductor substrate. the layer stack includes a first layer, a second layer between the first layer and the semiconductor substrate, and an opening penetrating through the first layer and the second layer to the trench. the structure further comprises a third layer inside the opening in the layer stack. the third layer, which comprises a semiconductor material, obstructs the opening to define a cavity inside the trench.

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