20230118227. FAST MEASUREMENT METHOD FOR MICRO-NANO DEEP GROOVE STRUCTURE BASED ON WHITE LIGHT INTERFERENCE simplified abstract (ZHEJIANG UNIVERSITY)
Contents
FAST MEASUREMENT METHOD FOR MICRO-NANO DEEP GROOVE STRUCTURE BASED ON WHITE LIGHT INTERFERENCE
Organization Name
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FAST MEASUREMENT METHOD FOR MICRO-NANO DEEP GROOVE STRUCTURE BASED ON WHITE LIGHT INTERFERENCE - A simplified explanation of the abstract
This abstract first appeared for US patent application 20230118227 titled 'FAST MEASUREMENT METHOD FOR MICRO-NANO DEEP GROOVE STRUCTURE BASED ON WHITE LIGHT INTERFERENCE
Simplified Explanation
Abstract: A fast measurement method for micro-nano deep groove structure based on white light interference is described. The method involves establishing a white light interference system, using the system to measure the structure of the groove, and processing the collected interferograms to obtain a 3D reconstruction diagram of the groove sample. The depth and width of the groove sample can then be measured based on the 3D reconstruction diagram.
Patent/Innovation:
- Establishing a white light interference system for measuring micro-nano deep groove structures.
- Collecting multiple groups of groove interferograms using a CCD camera.
- Processing the interferograms to obtain the maximum contrast and 3D reconstruction diagram of the local structure.
- Extracting the interface reconstruction diagram from the 3D reconstruction diagram.
- Splicing the interface reconstruction diagrams to obtain a 3D structural reconstruction diagram of the groove sample.
- Measuring the depth and width of the groove sample based on the 3D structural reconstruction diagram.
Potential Applications: This technology can be applied in various fields where precise measurement of micro-nano deep groove structures is required, such as:
- Semiconductor manufacturing: for measuring the depth and width of grooves in microchips.
- Optics and photonics: for measuring the dimensions of grooves in optical components.
- Biomedical engineering: for measuring the depth and width of grooves in microfluidic devices.
Problems Solved: The method solves the problem of accurately measuring the dimensions of micro-nano deep groove structures, which can be challenging using traditional measurement techniques. The white light interference system and 3D reconstruction provide a fast and accurate solution for obtaining the depth and width of the grooves.
Benefits:
- Fast measurement: The method allows for quick measurement of the dimensions of micro-nano deep groove structures.
- High accuracy: The white light interference system and 3D reconstruction provide precise measurements.
- Non-destructive: The method does not damage the groove sample during measurement.
- Versatile: The technology can be applied to various fields and different types of groove samples.
Original Abstract Submitted
a fast measurement method for micro-nano deep groove structure based on white light interference, including: establishing a white light interference system, using the white light interference system to measure the structure of the groove, the ccd camera collects and obtains multiple groups of groove interferograms and the serial number corresponding to each groove interferogram in each group; processing each group of groove interferograms of the groove sample to obtain the maximum contrast of each group of groove interferograms and the 3d reconstruction diagram of the local structure; extracting the interface reconstruction diagram in the 3d reconstruction diagram of the local structure according to each group of the groove interferograms; after splicing the interface reconstruction diagrams corresponding to all groups of groove interferograms, obtaining a 3d structural reconstruction diagram of the groove sample, and measuring the depth and width of the groove sample according to the 3d structural reconstruction diagram.
