18542356. EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION METHOD simplified abstract (Applied Materials, Inc.)
Contents
- 1 EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION METHOD
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION METHOD - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Unanswered Questions
- 1.11 Original Abstract Submitted
EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION METHOD
Organization Name
Inventor(s)
Wolfgang Buschbeck of Hanau (DE)
Stefan Bangert of Steinau (DE)
EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18542356 titled 'EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION METHOD
Simplified Explanation
The abstract describes an evaporation apparatus for evaporating a reactive material such as lithium, including an evaporation crucible, a material conduit, and a valve with a cooling device to solidify the liquid material in the conduit.
- Evaporation apparatus for evaporating reactive materials like lithium
- Includes evaporation crucible, material conduit, and valve with cooling device
- Valve closes material conduit by solidifying liquid material with cooling device
- Cooling gas supply for cooling gas in the valve
- Cooling device cools liquid material with cooling gas
Potential Applications
The technology can be used in industries such as battery manufacturing, semiconductor fabrication, and thin film deposition.
Problems Solved
The technology solves the problem of efficiently evaporating reactive materials like lithium without causing unwanted reactions or contamination.
Benefits
The benefits of this technology include precise control over the evaporation process, reduced waste of reactive materials, and improved product quality in vapor deposition applications.
Potential Commercial Applications
The technology can be applied in the production of lithium-ion batteries, solar cells, and other electronic devices requiring thin film coatings.
Possible Prior Art
One possible prior art is the use of traditional evaporation techniques that may not provide the same level of control and efficiency as the described apparatus.
Unanswered Questions
How does the cooling device prevent clogging in the material conduit?
The cooling device solidifies a part of the liquid material in the conduit, preventing clogging and ensuring smooth operation.
What is the expected lifespan of the evaporation crucible in this apparatus?
The lifespan of the evaporation crucible will depend on factors such as the frequency of use, the type of material being evaporated, and the maintenance of the apparatus. Regular inspection and replacement of worn parts may be necessary to ensure optimal performance.
Original Abstract Submitted
An evaporation apparatus is described, particularly for evaporating a reactive material such as lithium. The evaporation apparatus includes an evaporation crucible for evaporating a liquid material, a material conduit for supplying the liquid material to the evaporation crucible, and a valve configured to close the material conduit by solidifying a part of the liquid material in the material conduit with a cooling device. The valve may include a cooling gas supply for a cooling gas, and the cooling device may be configured to cool the liquid material with the cooling gas. Further described are a vapor deposition apparatus for coating a substrate as well as an evaporation method.
