18524231. MEMS Device, Electronic Apparatus, And Vehicle simplified abstract (SEIKO EPSON CORPORATION)

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MEMS Device, Electronic Apparatus, And Vehicle

Organization Name

SEIKO EPSON CORPORATION

Inventor(s)

Fumiya Ito of Chikuma (JP)

MEMS Device, Electronic Apparatus, And Vehicle - A simplified explanation of the abstract

This abstract first appeared for US patent application 18524231 titled 'MEMS Device, Electronic Apparatus, And Vehicle

Simplified Explanation

The MEMS device described in the patent application includes a substrate with a support portion and a detection electrode, a movable body with a major surface facing the fixed electrode, and an abutment portion restricting rotational displacement in an in-plane direction.

  • The MEMS device comprises a substrate with a support portion and a detection electrode.
  • A movable body is supported to the support portion with a major surface facing the fixed electrode.
  • An abutment portion restricts rotational displacement in an in-plane direction, with an abutment surface and a hollow portion provided opposing the abutment surface.

Potential Applications

This technology could be applied in:

  • Accelerometers
  • Gyroscopes
  • Pressure sensors

Problems Solved

This technology helps in:

  • Improving the accuracy of MEMS devices
  • Enhancing the stability of the movable body
  • Preventing unwanted rotational displacement

Benefits

The benefits of this technology include:

  • Increased precision in detection
  • Enhanced reliability of MEMS devices
  • Improved performance in various applications

Potential Commercial Applications

This technology could be commercially benefit:

  • Consumer electronics
  • Automotive industry
  • Aerospace sector

Possible Prior Art

One possible prior art for this technology could be:

  • Existing MEMS devices with similar structures and functionalities

Unanswered Questions

How does this technology compare to existing MEMS devices in terms of performance and reliability?

This article does not provide a direct comparison between this technology and existing MEMS devices. Further research and testing would be needed to determine the specific advantages and disadvantages of this innovation.

What are the potential limitations or challenges in implementing this technology on a larger scale for commercial applications?

The article does not address the scalability or potential challenges in commercializing this technology. Additional studies and market analysis would be required to assess the feasibility of mass production and integration into various industries.


Original Abstract Submitted

A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.