18518464. SEMICONDUCTOR MANUFACTURING SYSTEM, BEHAVIOR RECOGNITION DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.)

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SEMICONDUCTOR MANUFACTURING SYSTEM, BEHAVIOR RECOGNITION DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD

Organization Name

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

Inventor(s)

KAI-TING Yang of TAICHUNG CITY (TW)

LI-JEN Ko of HSINCHU COUNTY (TW)

HSIANG YIN Shen of HSINCHU (TW)

SEMICONDUCTOR MANUFACTURING SYSTEM, BEHAVIOR RECOGNITION DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD - A simplified explanation of the abstract

This abstract first appeared for US patent application 18518464 titled 'SEMICONDUCTOR MANUFACTURING SYSTEM, BEHAVIOR RECOGNITION DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD

Simplified Explanation

The behavior recognition device described in the patent application is designed to analyze behaviors related to wafer transfer sequences and manufacturing operations of a semiconductor manufacturing apparatus by building a transition state model based on log data stored in a storage device.

  • The device includes a storage device for storing log data of the semiconductor manufacturing apparatus.
  • It also includes a control unit that is connected to the storage device and is responsible for building a transition state model based on the log data to analyze behaviors related to wafer transfer sequences and manufacturing operations.

Potential Applications

The technology described in the patent application could be applied in various industries beyond semiconductor manufacturing, such as:

  • Robotics
  • Automotive manufacturing
  • Pharmaceutical production

Problems Solved

This technology helps in:

  • Identifying inefficiencies in wafer transfer sequences
  • Improving manufacturing operations
  • Enhancing overall productivity and quality control

Benefits

The benefits of this technology include:

  • Increased efficiency in semiconductor manufacturing processes
  • Enhanced analysis of manufacturing behaviors
  • Improved decision-making based on data-driven insights

Potential Commercial Applications

The potential commercial applications of this technology could include:

  • Manufacturing automation systems
  • Quality control solutions for semiconductor industry
  • Process optimization tools for various manufacturing sectors

Possible Prior Art

One possible prior art for this technology could be:

  • Existing behavior recognition systems used in industrial automation

Unanswered Questions

How does this technology impact the overall efficiency of semiconductor manufacturing processes?

This technology can significantly improve the efficiency of semiconductor manufacturing processes by identifying bottlenecks, optimizing wafer transfer sequences, and enhancing overall productivity.

What are the potential cost savings associated with implementing this technology in semiconductor manufacturing?

By streamlining manufacturing operations, reducing errors, and improving quality control, this technology can lead to significant cost savings for semiconductor manufacturers in terms of reduced waste, increased yield, and improved resource utilization.


Original Abstract Submitted

A behavior recognition device for recognizing behaviors of a semiconductor manufacturing apparatus includes a storage device and a control unit. The storage device is configured to store log data of the semiconductor manufacturing apparatus. The control unit is cooperatively connected to the storage device, and configured to build a transition state model based on the log data to analyze behaviors related to wafer transfer sequences and manufacturing operations of the semiconductor manufacturing apparatus.