18511438. Metal-Insulator-Metal Structure simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
Contents
Metal-Insulator-Metal Structure
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.
Inventor(s)
Yuan-Yang Hsiao of Hsinchu (TW)
Hsiang-Ku Shen of Hsinchu City (TW)
Metal-Insulator-Metal Structure - A simplified explanation of the abstract
This abstract first appeared for US patent application 18511438 titled 'Metal-Insulator-Metal Structure
Simplified Explanation
The semiconductor device described in the abstract includes a metal-insulator-metal structure with multiple conductor plate layers and dummy plates for alignment purposes.
- Metal-insulator-metal structure with multiple conductor plate layers
- Dummy plates for vertical alignment
- First, second, and third openings for conductor plates
- First and second dielectric layers for insulation
- Simplified explanation of a patent application for a semiconductor device with a metal-insulator-metal structure and dummy plates for alignment.
Potential Applications
- High-speed integrated circuits
- Memory devices
- Communication devices
Problems Solved
- Improved alignment accuracy
- Enhanced signal integrity
- Reduced crosstalk between conductor plates
Benefits
- Higher performance semiconductor devices
- Increased reliability
- Improved manufacturing efficiency
Original Abstract Submitted
Semiconductor devices, integrated circuits and methods of forming the same are provided. In one embodiment, a semiconductor device includes a metal-insulator-metal structure which includes a bottom conductor plate layer including a first opening and a second opening, a first dielectric layer over the bottom conductor plate layer, a middle conductor plate layer over the first dielectric layer and including a third opening, a first dummy plate disposed within the third opening, and a fourth opening, a second dielectric layer over the middle conductor plate layer, and a top conductor plate layer over the second dielectric layer and including a fifth opening, a second dummy plate disposed within the fifth opening, a sixth opening, and a third dummy plate disposed within the sixth opening. The first opening, the first dummy plate, and the second dummy plate are vertically aligned.
