18506177. EMBEDDED FERROELECTRIC MEMORY CELL simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

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EMBEDDED FERROELECTRIC MEMORY CELL

Organization Name

Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor(s)

Tzu-Yu Chen of Kaohsiung City (TW)

Kuo-Chi Tu of Hsin-Chu (TW)

Wen-Ting Chu of Kaohsiung City (TW)

Yong-Shiuan Tsair of Tainan City (TW)

EMBEDDED FERROELECTRIC MEMORY CELL - A simplified explanation of the abstract

This abstract first appeared for US patent application 18506177 titled 'EMBEDDED FERROELECTRIC MEMORY CELL

Simplified Explanation

The present disclosure describes an integrated chip structure with a first source/drain region, a second source/drain region, a select gate, a FeRAM device, and a transistor device on a substrate with a recessed surface.

  • Integrated chip structure with multiple components on a substrate
  • Select gate between first and second source/drain regions
  • FeRAM device located over the substrate between select gate and first source/drain region
  • Transistor device on upper surface of the substrate
  • Recessed surface on the substrate below the upper surface, separated by a boundary isolation structure
  • FeRAM device arranged over the recessed surface

Potential Applications

  • Memory storage devices
  • Integrated circuits
  • Semiconductor devices

Problems Solved

  • Efficient use of space on a substrate
  • Integration of multiple components in a chip structure
  • Improved performance of FeRAM devices

Benefits

  • Higher density of components on a chip
  • Enhanced functionality of FeRAM devices
  • Improved overall performance of integrated circuits


Original Abstract Submitted

The present disclosure relates to an integrated chip structure. The integrated chip structure includes a first source/drain region and a second source/drain region disposed within a substrate. A select gate is over the substrate between the first source/drain region and the second source/drain region. A ferroelectric random access memory (FeRAM) device is over the substrate between the select gate and the first source/drain region. A transistor device is disposed on an upper surface of the substrate. The substrate has a recessed surface that is below the upper surface of the substrate and that is laterally separated from the upper surface of the substrate by a boundary isolation structure extending into a trench within the upper surface of the substrate. The FeRAM device is arranged over the recessed surface.