18489404. FABRICATION OF NANOIMPRINT WORKING STAMPS WITH COMBINED PATTERNS FROM MULTIPLE MASTER STAMPS simplified abstract (GOOGLE LLC)

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FABRICATION OF NANOIMPRINT WORKING STAMPS WITH COMBINED PATTERNS FROM MULTIPLE MASTER STAMPS

Organization Name

GOOGLE LLC

Inventor(s)

Lu Tian of Palo Alto CA (US)

Wei Jin of Saratoga CA (US)

Thomas Mercier of Weston FL (US)

FABRICATION OF NANOIMPRINT WORKING STAMPS WITH COMBINED PATTERNS FROM MULTIPLE MASTER STAMPS - A simplified explanation of the abstract

This abstract first appeared for US patent application 18489404 titled 'FABRICATION OF NANOIMPRINT WORKING STAMPS WITH COMBINED PATTERNS FROM MULTIPLE MASTER STAMPS

Simplified Explanation

The method described in the abstract involves using a series of master stamps in a step lithography process to fabricate a working stamp with surface gratings for waveguide workpieces. The process includes pressing a master stamp into a material layer, applying ultraviolet light to cure the material, and detaching the master stamp.

  • Step lithography process using master stamps
  • Forming surface gratings in a waveguide workpiece
  • Pressing master stamp into material layer
  • Applying ultraviolet light to cure the material
  • Detaching master stamp from the working stamp

Potential Applications

The technology can be applied in the manufacturing of waveguide devices, optical components, and sensors that require surface gratings for specific functionalities.

Problems Solved

This method solves the problem of efficiently and accurately forming surface gratings in waveguide workpieces, which is crucial for the performance of optical devices.

Benefits

The benefits of this technology include precise control over the formation of surface gratings, repeatability in the manufacturing process, and the ability to create complex patterns on waveguide workpieces.

Potential Commercial Applications

The technology can be commercialized in the production of optical communication devices, sensors for various industries, and components for integrated photonics systems.

Possible Prior Art

One possible prior art could be the use of traditional lithography techniques for forming surface gratings in waveguide workpieces. However, the described method offers a more efficient and controlled approach to this process.

Unanswered Questions

How does this method compare to traditional lithography techniques for forming surface gratings?

The article does not provide a direct comparison between this method and traditional lithography techniques in terms of efficiency, accuracy, or cost-effectiveness.

What are the specific materials required for the working stamp workpiece in this method?

The article does not specify the exact materials needed for the working stamp workpiece, which could be crucial for understanding the feasibility and scalability of the process.


Original Abstract Submitted

A method for fabricating a working stamp for forming surface gratings in a waveguide workpiece includes performing a series of step lithography processes using a series of master stamps so as to form a working stamp having a first surface having a plurality of surface gratings formed therein. Each step lithography process includes pressing a master stamp of the series of master stamps into a material layer of a working stamp workpiece at a corresponding region of the material layer, the master stamp having a plurality of surface grating patterns formed thereon. Each step lithography process further includes applying ultraviolet light to the corresponding region to locally cure the material layer at the corresponding region and detaching the master stamp from the material of the working stamp after applying the ultraviolet light.