18475712. METHOD FOR MANUFACTURING VIBRATOR simplified abstract (SEIKO EPSON CORPORATION)
Contents
- 1 METHOD FOR MANUFACTURING VIBRATOR
METHOD FOR MANUFACTURING VIBRATOR
Organization Name
Inventor(s)
Hiyori Sakata of Shinagawa-ku (JP)
Keiichi Yamaguchi of Ina-shi (JP)
Ryuta Nishizawa of Nagano-shi (JP)
Shigeru Shiraishi of Ina-shi (JP)
METHOD FOR MANUFACTURING VIBRATOR - A simplified explanation of the abstract
This abstract first appeared for US patent application 18475712 titled 'METHOD FOR MANUFACTURING VIBRATOR
Simplified Explanation
The patent application describes a method for manufacturing a vibrator using a quartz crystal substrate with protective films and dry etching.
- Quartz crystal substrate with protective films and dry etching:
- Preparation of quartz crystal substrate with front and back surfaces - Formation of protective films with openings for groove formation regions - Dry etching of the substrate through the protective film
Potential Applications
The technology can be applied in the manufacturing of electronic devices such as sensors, oscillators, and resonators.
Problems Solved
- Improved precision in manufacturing vibrators - Enhanced durability and performance of electronic devices
Benefits
- Higher quality and reliability of vibrators - Increased efficiency in electronic device production
Potential Commercial Applications
Optimizing the manufacturing process of electronic devices for various industries, including telecommunications, automotive, and consumer electronics.
Possible Prior Art
There may be prior art related to the manufacturing of vibrators using quartz crystal substrates and protective films, but specific examples are not provided in the patent application.
Unanswered Questions
How does this technology compare to existing methods for manufacturing vibrators using quartz crystal substrates?
The patent application does not provide a direct comparison with existing methods, so it is unclear how this technology differs in terms of efficiency, cost, or performance.
What are the specific electronic devices that can benefit from the use of this manufacturing method?
While the patent application mentions electronic devices in general, it does not specify which types of devices can specifically benefit from the improved vibrator manufacturing process.
Original Abstract Submitted
A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface that are in a front and back relationship, a first protective film formation step of forming a first protective film in an element formation region of the first surface, the first protective film having a first opening overlapping a first groove formation region and a second opening overlapping a second groove formation region, in which a region of the quartz crystal substrate where the vibrator is formed is referred to as the element formation region, a region where the first groove is formed is referred to as the first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film. Wa<Wb, in which Wa represents a width of the first opening and Wb represents a width of the second opening.
